Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10003014 | Method of forming an on-pitch self-aligned hard mask for contact to a tunnel junction using ion beam etching | Michael C. Gaidis, Erwan Gapihan, Eugene J. O'Sullivan | 2018-06-19 |