Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9916985 | Indium phosphide smoothing and chemical mechanical planarization processes | Henry A. Beveridge, Tatsuyoshi Kawamoto, Yohei Oishi, Dinesh Kumar Penigalapati, Rachel S. Steiner +2 more | 2018-03-13 |
| 9890300 | Germanium smoothing and chemical mechanical planarization processes | Tatsuyoshi Kawamoto, Yohei Oishi, Dinesh Kumar Penigalapati, Rachel S. Steiner, James A. Tornello +1 more | 2018-02-13 |