Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096477 | Method to improve adhesion of photoresist on silicon substrate for extreme ultraviolet and electron beam lithography | Martin Glodde | 2018-10-09 |
| 9950349 | Drying an extreme ultraviolet (EUV) pellicle | — | 2018-04-24 |
| 9915867 | Mechanical isolation control for an extreme ultraviolet (EUV) pellicle | — | 2018-03-13 |