Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9941135 | Methods of forming a hard mask layer and of fabricating a semiconductor device using the same | Sejun PARK, Dohyung Kim, Jaihyung Won, Sangho Roh, Eunsol Shin +1 more | 2018-04-10 |