Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141906 | High Q quartz-based MEMS resonators and method of fabricating same | David T. Chang, Frederic P. Stratton, Hung Nguyen | 2018-11-27 |
| 10110198 | Integrated quartz MEMS tuning fork resonator/oscillator | — | 2018-10-23 |
| 9991863 | Rounded and curved integrated tethers for quartz resonators | Deborah J. Kirby, David T. Chang | 2018-06-05 |
| 9985198 | High Q quartz-based MEMS resonators and methods of fabricating same | David T. Chang, Frederic P. Stratton, Hung Nguyen | 2018-05-29 |
| 9879997 | Quartz resonator with plasma etched tethers for stress isolation from the mounting contacts | Yook-Kong Yong, Deborah J. Kirby, David T. Chang | 2018-01-30 |