Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10126641 | Multilayer reflective film formed substrate, reflective mask blank, mask blank, methods of manufacturing the same, reflective mask, and mask | Kazuhiro Hamamoto | 2018-11-13 |
| 10067419 | Method for manufacturing reflective mask blank, and method for manufacturing reflective mask | Kazuhiro Hamamoto, Yohei IKEBE | 2018-09-04 |
| 10025176 | Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask, method of manufacturing mask blank substrate, method of manufacturing substrate with reflective film and method of manufacturing semiconductor device | Kazuhiro Hamamoto, Toshihiko Orihara, Junichi Horikawa | 2018-07-17 |
| 10001699 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method | Toshihiko Orihara, Kazuhiro Hamamoto, Hirofumi Kozakai, Youichi Usui, Junichi Horikawa | 2018-06-19 |
| 9897909 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method | Kazuhiro Hamamoto, Toshihiko Orihara, Hirofumi Kozakai, Youichi Usui, Junichi Horikawa | 2018-02-20 |
| 9864267 | Reflective mask blank, reflective mask, and method for manufacturing semiconductor device | Yohei IKEBE, Takahiro Onoue | 2018-01-09 |