Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10126761 | Gas insensitive mass flow control systems and methods | Ryan W. Johnson, Alexei V. Smirnov, Cy Jordan, Arun Nagarajan | 2018-11-13 |
| 10041825 | On-tool mass flow controller diagnostic systems and methods | Alexei V. Smirnov | 2018-08-07 |