Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9934946 | Plasma processing apparatus and operating method of plasma processing apparatus | Yohei Kawaguchi, Tatehito Usui, Satomi Inoue, Shigeru Nakamoto | 2018-04-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9934946 | Plasma processing apparatus and operating method of plasma processing apparatus | Yohei Kawaguchi, Tatehito Usui, Satomi Inoue, Shigeru Nakamoto | 2018-04-03 |