Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10018277 | Flow rate control valve and mass flow controller using the same | Takahiro Umeyama, Toshihiko Shimizu | 2018-07-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10018277 | Flow rate control valve and mass flow controller using the same | Takahiro Umeyama, Toshihiko Shimizu | 2018-07-10 |