Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D828091 | Gas supply nozzle | Toshiki Fujino, Yuma Fujii, Kazuki NONOMURA, Yoshinori Baba, Yuji Takebayashi | 2018-09-11 |
| 9970112 | Substrate processing apparatus and method of manufacturing semiconductor device | Yasunobu Koshi, Akihito Yoshino | 2018-05-15 |