KY

Katsushi Yagi

HH Hitachi High-Technologies: 1 patents #105 of 409Top 30%
Overall (2018): #347,749 of 503,207Top 70%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10090160 Dry etching apparatus and method Masahito Mori, Masaru Izawa 2018-10-02