Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991147 | Wafer grounding and biasing method, apparatus, and application | Yi Wang, Kenichi Kanai | 2018-06-05 |
| 9922799 | Apparatus of plural charged-particle beams | Shuai Li, Weiming Ren, Xuedong Liu, Xuerang Hu, Zhongwei Chen | 2018-03-20 |