Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10024577 | Solar radiation receiver having an entry window made of quartz glass and method for producing an entry window | Achim Hofmann, Michael Hünermann, Christian Schenk | 2018-07-17 |
| 10016872 | Method for producing a mirror substrate blank of titanium-doped silica glass for EUV lithography, and system for determining the position of defects in a blank | — | 2018-07-10 |