Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10112218 | Chamber cleaning apparatus and control method thereof | Jin Ke Hu, Changkai Jie | 2018-10-30 |
| 9910356 | Method of patterning thin films | Lei Zhang, Zhuyi Luo, Jinho YOUN, Jianqiang Guo, HONGLIN LIAO | 2018-03-06 |