Valery Godyak

MT Mattson Technology: 2 patents #1 of 10Top 10%

📍 Brookline, MA: #44 of 455 inventorsTop 10%

🗺 Massachusetts: #1,284 of 12,682 inventorsTop 15%

Overall (2018): #53,334 of 503,207Top 15%

Patents 2018

Issued Patents 2018

Showing 1–3 of 3 patents

Patent #	Title	Co-Inventors	Date
10090134	Plasma reactor with inductive excitation of plasma and efficient removal of heat from the excitation coil	—	2018-10-02
10083817	Linear remote plasma source	—	2018-09-25
10037867	Inductive plasma source with high coupling efficiency	—	2018-07-31