Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161915 | In-situ contactless monitoring of photomask pellicle degradation | Arthur Hotzel | 2018-12-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161915 | In-situ contactless monitoring of photomask pellicle degradation | Arthur Hotzel | 2018-12-25 |