Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10048489 | Mirror driving device and driving method for same | — | 2018-08-14 |
| 10020443 | Method of producing laminated thin film structure, laminated thin film structure, and piezoelectric element including same | Takahiro Sano | 2018-07-10 |
| 9960339 | Piezoelectric actuator | — | 2018-05-01 |
| 9864189 | Mirror drive device and driving method thereof | — | 2018-01-09 |