Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153165 | Patterning method | Feng-Yi Chang, Fu-Che Lee, Chien-Cheng Tsai | 2018-12-11 |
| 10141223 | Method of improving micro-loading effect when recess etching tungsten layer | Li-Chiang Chen, Fu-Che Lee | 2018-11-27 |
| 10062613 | Semiconductor device and method for fabricating the same | Feng-Yi Chang, Shih-Fang Tzou, Yu-Cheng Tung, Li-Chiang Chen | 2018-08-28 |
| 10032631 | Method of fabricating mask pattern | Li-Chiang Chen, Fu-Che Lee, Hsien-Shih Chu, Cheng-Yu Wang, Yu-Chen Chuang | 2018-07-24 |
| 9887088 | Method for fabricating semiconductor device | Feng-Yi Chang, Shih-Fang Tzou, Fu-Che Lee, Li-Chiang Chen | 2018-02-06 |