Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101665 | Illumination unit and device for lithographic exposure | Tina Weichelt, Yannick Bourgin | 2018-10-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101665 | Illumination unit and device for lithographic exposure | Tina Weichelt, Yannick Bourgin | 2018-10-16 |