Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9944829 | Halite salts as silicon carbide etchants for enhancing CMP material removal rate for SiC wafer | — | 2018-04-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9944829 | Halite salts as silicon carbide etchants for enhancing CMP material removal rate for SiC wafer | — | 2018-04-17 |