Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10145012 | Substrate processing apparatus and substrate processing method | Sung Tae Je, Chang Hoon Yun, Kyong-Hun Kim | 2018-12-04 |
| 10006121 | Method and apparatus for manufacturing three-dimensional-structure memory device | Sung Kil CHO, Hai Won Kim, Sang Ho Woo, Seung Woo Shin, Wan Suk Oh | 2018-06-26 |