MS

Mark V. Smith

EN Entegris: 3 patents #3 of 85Top 4%
Overall (2018): #65,002 of 503,207Top 15%
3
Patents 2018

Issued Patents 2018

Patent #TitleCo-InventorsDate
10043696 Wafer container with tubular environmental control components James A. Watson, John Burns, Martin L. Forbes, Matthew A. Fuller 2018-08-07
10032660 Porous barrier for evenly distributed purge gas in a microenvironment John Burns, Matthew A. Fuller 2018-07-24
9997388 Substrate container with purge ports John Burns 2018-06-12