Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10155921 | Removal composition for selectively removing hard mask and methods thereof | — | 2018-12-18 |
| 10104084 | Token scope reduction | Andrew Biggs, Shaun Cooley, Matt Miller, Ian Remmel | 2018-10-16 |
| 10005991 | Removal composition for selectively removing hard mask and methods thereof | — | 2018-06-26 |
| 9972485 | Method and composition for removing resist, etch residue, and copper oxide from substrates having copper, metal hardmask and low-k dielectric material | — | 2018-05-15 |