Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134614 | Substrate peripheral portion measuring device, and substrate peripheral portion polishing apparatus | Mitsuo Tada, Hirofumi Ichihara, Kenya Ito, Tamami Takahashi | 2018-11-20 |