Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9966245 | Cooling apparatus, illumination optical system, exposure apparatus, and method of manufacturing article | Kentaro Hiruma, Noboru Osaka | 2018-05-08 |
MF
Manato Furusawa
Overall (2018): #321,803 of 503,207Top 65%
1
Patents 2018