JY

Junitsu Yamakawa

EB Ebara: 1 patents #63 of 140Top 45%
Overall (2018): #353,084 of 503,207Top 75%
1
Patents 2018

Issued Patents 2018

Patent #TitleCo-InventorsDate
10163672 Substrate processing device, method for controlling substrate processing device, and storage medium storing programs Takuya Tsushima 2018-12-25