Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10131030 | Buffing apparatus and substrate processing apparatus | Kuniaki Yamaguchi, Toshio Mizuno | 2018-11-20 |
| 9969048 | Polishing apparatus | Yoichi Kobayashi, Katsutoshi Ono, Masaki Kinoshita, Toshifumi Kimba | 2018-05-15 |