Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10092992 | Polishing apparatus, polishing head, and retainer ring | Makoto Fukushima, Osamu Nabeya | 2018-10-09 |
| 10040166 | Polishing apparatus | Osamu Nabeya, Tetsuji Togawa, Makoto Fukushima | 2018-08-07 |
| 9999956 | Polishing device and polishing method | Keisuke Namiki, Osamu Nabeya, Makoto Fukushima, Shingo Togashi, Satoru Yamaki +1 more | 2018-06-19 |
| D813180 | Elastic membrane for semiconductor wafer polishing apparatus | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2018-03-20 |
| 9884401 | Elastic membrane and substrate holding apparatus | Makoto Fukushima, Osamu Nabeya, Shingo Togashi | 2018-02-06 |
| D808349 | Elastic membrane for semiconductor wafer polishing apparatus | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2018-01-23 |