Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10037889 | Cationic particle containing slurries and methods of using them for CMP of spin-on carbon films | Julia Kozhukh, Lee Melbourne Cook | 2018-07-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10037889 | Cationic particle containing slurries and methods of using them for CMP of spin-on carbon films | Julia Kozhukh, Lee Melbourne Cook | 2018-07-31 |