Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9971238 | Mask blank, phase shift mask, and production method thereof | Hiroshi Watanabe, Katsuya Hayano, Hideyoshi Takamizawa, Youhei Ohkawa, Takashi Adachi +1 more | 2018-05-15 |