Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9971238 | Mask blank, phase shift mask, and production method thereof | Hiroshi Watanabe, Katsuya Hayano, Hideyoshi Takamizawa, Youhei Ohkawa, Takashi Adachi +1 more | 2018-05-15 |
| 9874808 | Mask blank, mask blank with negative resist film, phase shift mask, and method for producing pattern formed body using same | Takashi Adachi, Youichi Miura, Hideyoshi Takamizawa, Katsuya Hayano, Youhei Ohkawa +1 more | 2018-01-23 |