Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147610 | Substrate pedestal module including metallized ceramic tubes for RF and gas delivery | Ramkishan Rao Lingampalli, Joel Hollingsworth | 2018-12-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147610 | Substrate pedestal module including metallized ceramic tubes for RF and gas delivery | Ramkishan Rao Lingampalli, Joel Hollingsworth | 2018-12-04 |