Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153183 | High speed low temperature method for manufacturing and repairing semiconductor processing equipment and equipment produced using same | Alfred Grant Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex, Alexander Veytser | 2018-12-11 |
| 9999947 | Method for repairing heaters and chucks used in semiconductor processing | Frank Balma, Alexander Veytser, Michael Parker, JEFF CUNHA | 2018-06-19 |
| 9984866 | Multiple zone heater | Alfred Grant Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex, Alexander Veytser | 2018-05-29 |