SS

Shuo Shi

SC Shanghai Micro Electronics Equipment (Group) Co.: 1 patents #3 of 22Top 15%
Overall (2018): #238,438 of 503,207Top 50%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10133153 Self-damping shutter apparatus for exposure system of photolithography machine Hanchuan Ji 2018-11-20