Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10082346 | Cooling module and apparatus for thermally treating substrates | Matthias Tumback, Reinhard Lenz, Moritz Vogt | 2018-09-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10082346 | Cooling module and apparatus for thermally treating substrates | Matthias Tumback, Reinhard Lenz, Moritz Vogt | 2018-09-25 |