Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10090148 | Water-repellent protective film, and chemical solution for forming protective film | Takashi Saio, Masanori Saito, Shinobu Arata | 2018-10-02 |
| 10077365 | Liquid chemical for forming water repellent protecting film, and process for cleaning wafers using the same | Takashi Saio, Masanori Saito, Shinobu Arata | 2018-09-18 |
| 10037882 | Method for cleaning wafer | Masanori Saito, Takashi Saio, Shinobu Arata | 2018-07-31 |