Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10079150 | Method and apparatus for dry gas phase chemically etching a structure | Kyle S. Lebouitz | 2018-09-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10079150 | Method and apparatus for dry gas phase chemically etching a structure | Kyle S. Lebouitz | 2018-09-18 |