Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10095101 | Critical dimension variation correction in extreme ultraviolet lithography | Sergey Oshemkov, Vladimir Kruglyakov, Frederik Blumrich | 2018-10-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10095101 | Critical dimension variation correction in extreme ultraviolet lithography | Sergey Oshemkov, Vladimir Kruglyakov, Frederik Blumrich | 2018-10-09 |