Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10018918 | Method for adjusting a projection objective | — | 2018-07-10 |
| 9915871 | Method for measuring an angularly resolved intensity distribution and projection exposure apparatus | Dirk Hellweg | 2018-03-13 |