Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9910193 | Reflective optical element and EUV lithography appliance | Hans-Juergen Mann, Udo Nothelfer | 2018-03-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9910193 | Reflective optical element and EUV lithography appliance | Hans-Juergen Mann, Udo Nothelfer | 2018-03-06 |