Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10039177 | Source hollow body and EUV plasma light source comprising such a source hollow body | Sebastian Schall | 2018-07-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10039177 | Source hollow body and EUV plasma light source comprising such a source hollow body | Sebastian Schall | 2018-07-31 |