Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9947504 | Particle beam apparatus and method for operating a particle beam apparatus | Klaus Hegele, Edgar Fichter, Michel Aliman, Dirk Preikszas, Christian Hendrich +2 more | 2018-04-17 |