Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9916997 | End structure of nozzle, purging device, and load port | Toshimitsu Morihana, Mitsuo Natsume | 2018-03-13 |
| 9900973 | Cooling device | — | 2018-02-20 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9916997 | End structure of nozzle, purging device, and load port | Toshimitsu Morihana, Mitsuo Natsume | 2018-03-13 |
| 9900973 | Cooling device | — | 2018-02-20 |