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Tomoyuki Tamura

HH Hitachi High-Technologies: 1 patents #105 of 409Top 30%
Overall (2018): #207,033 of 503,207Top 45%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9941133 Plasma processing apparatus and plasma processing method Masaki Ishiguro, Masahiro Sumiya, Shigeru Shirayone, Kazuyuki Ikenaga 2018-04-10