Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9977347 | Positioning apparatus, lithography apparatus, and method of manufacturing article | Kentaro Suzuki, Satoshi Iwatani | 2018-05-22 |
| 9947508 | Lithography apparatus, and method of manufacturing an article | Daisuke Iwase | 2018-04-17 |