Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9880475 | Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing method | Shinichiro Koga, Akihiko Kawamura | 2018-01-30 |
NT
Noburu Takakura
Overall (2018): #287,069 of 503,207Top 60%
1
Patents 2018