Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10031429 | Method of obtaining position, exposure method, and method of manufacturing article | Akihiko Kawamura, Naoto Ohkawa, Tetsuji Kazaana, Takanori Morooka | 2018-07-24 |
| 9946169 | Exposure apparatus and device manufacturing method | — | 2018-04-17 |