Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10036965 | Stage apparatus, lithography apparatus, and device manufacturing method | — | 2018-07-31 |
MY
Masanori Yamada
Overall (2018): #309,523 of 503,207Top 65%
1
Patents 2018