Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10067325 | Projection optical system, exposure apparatus, and article manufacturing method | Michio Kono, Ryosuke Fukuoka | 2018-09-04 |
KF
Kiyoshi Fukami
Overall (2018): #341,345 of 503,207Top 70%
1
Patents 2018