Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9946056 | Illumination optical system, exposure apparatus, and method of manufacturing article | — | 2018-04-17 |
HS
Hiromi Suda
Overall (2018): #396,878 of 503,207Top 80%
1
Patents 2018